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Highly symmetrical molecules such as CH4, CF4 or SF6 are known to be atmospheric pollutants and greenhouse gases. High-resolution spectroscopy in the

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Decomposed Das Density of CF3I as a Substitute for SF6 Gas

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Breakdown characteristics of SF6 /CF4 mixtures in 25.8 kV

SFsub6/sub gas has excellent dielectric strength, but it causes global warming about 23900 times more than COsub2/

of Gases in Liquids 9. Solubility of He, Ne, Ar, Kr, N2,

The Solubility of Gases in Liquids 9. Solubility of He, Ne, Ar, Kr, N2, O2, CO, CO2, CH4, CF4, and SF6 in some Dimethylcyclohexanes at 298

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Last modification on : Thursday, February 7, 2019 - 4:56:13 PMReactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2

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Negative ion motion in the mixtures of SF6 with CF4 and CH4-Ar.

This paper deals with the measurement of the mobility of negative ions in the mixtures of SF6 with CF4 and the CH4-Ar (50:50) binary mixture with

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Gas temperature measurement in CF4, SF6, O2, Cl2, and HBr

Neutral gas temperature ( T g ) is measured in an industrial high-density inductively coupled etch reactor operating in C F 4 , S F 6 , O 2 ,

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The films deposition rate was found to increase with the decreasing CF4 concentration in the gas mixture. Fourier transform spectroscopy revealed the

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(X=1-3) fragments from N2---SF6 and N2---CF4 discharges -

K. (1994) Possible reaction of atomic nitrogen with SFx (X=1-5 and CFx (X=1-3) fragments from N2---SF6 and N2---CF4 discharges Chemical

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The fluorination of the polymer polyethylene terephthalate in plasma created from SF6 or CF4 gas at various pressures was investigated. The surface was

of Gases in Liquids. 20. Solubility of He, Ne, Ar, Kr, N2,

The Ostwald coefficients L2,1 of He, Ne, Ar, Kr, N2, O2, CH4, CF4, and SF6 dissolved in several homologous n-alkanes, n-ClH2l+2, 6 ≤ l

gases in liquids. 19. Solubility of He, Ne, Ar, Kr, Xe, N2

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gases in liquids. 19. Solubility of He, Ne, Ar, Kr, Xe, N2

Solubility of Gases in Binary Liquid Mixtures: An Experimental and 20. Solubility of He, Ne, Ar, Kr, N2, O2, CH4, CF4, and SF6 in

Use of SF6 and CF4 | SpringerLink

The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

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