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The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

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The fluorination of the polymer polyethylene terephthalate in plasma created from SF6 or CF4 gas at various pressures was investigated. The surface was

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10. A method for purifying a fluorine compound gas by removing a metal CF4, SF6 and BF3, and contains hydrogen fluoride and at least one