《CIGRE guide for SF6 gas mixtures》.pdf、

Reactive Ion Etching in  SF  6 Gas Mixturesdoi:10.1149/1.2100400Reactive ion etching of crystalline silicon, polysilicon, , and has been studied

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Breakdown in Compressed HE/SF6 Gas Mixtures in Uniform Field

Breakdown in Compressed HE/SF6 Gas Mixtures in Uniform Fielddoi:10.1109/tei.1986./p>

ICP etching of ZnO in BCl3/SF6 gas mixtures

ICP etching of ZnO in BCl3/SF6 gas mixturesEtchingZinc oxideEquipment and ZnO epitaxial layers were plasma etched using BCl/SFgas mixtures in an

Electron transport coefficients in SF6 and xenon gas mixtures

Ne He. Because all the mixture gases used in the test are the linear mixed gases, then after mixing these gases with SF6, they discharge

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