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Gas-insulated switchgear (GIS) using sulfur hexafluoride (SF6) as insulating medium has been widely utilized in electrical industry. However, SF6gas will

their development into creeping discharges at solid/gas

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for METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Patent

treatment (reflow), chemical mechanical polishing (device having a plurality of contact holes of a F based gas such as a SF6 gas, a chloro

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201931- gas sampling, manufacturing and metrology To meet increasing safety and environmental of 0.1% of total SF6 amount in any given

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